reactor

Reactors
MT7700 and 7810 epitaxial reactors.

Expansion

Expansion Kits
Increase throughput and improve uniformity.

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Spare Parts
Gas rings, exhaust cups, and many other parts and consumables.

console

Turboconsole
Improve downtime and process with control console replacement.

lamps

Lamp Modules and Gold
Lamp modules and gold replacement parts.

9zoneTemperature Control Systems
Replace old 3-zone systems with new 8-zone systems for more accurate control. .

rotation

Rotation Replacements
Replace outdated rotation motors.

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MFC Conversion Box
Use new style MFC/AFC for gas delivery..

Moore Semiconductor Parts Inc. can supply all your spare parts needs for AMT78XX, AMT7700, MT7700 and MT7700K epitaxial barrel reactors.

* All our parts are licensed and inspected to the manufacturer's original drawings.

* Products meet original factory specs through licensing agreements.

* All products are Q.A. inspected prior to shipment.

* Stocked parts shipped globally within 24 hours.

* Replacement parts for hard to find items.

* Improved options available for all reactors.

 

 

News updates

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New MFC replacement system for 7800, 7810, and 7700 epi systems.
11-11-09

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Replacement rotation motor for 7810 and 770 epi reactors.
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What We Do

Moore Semiconductor Parts offers many services and products for epitaxial reactors.

  • Reactor rebuilds
  • Spare parts
  • Part modifications
  • Process Support
  • Training Classes

Get in touch

Telephone: +1-209-740-4311
FAX: +1-209-740-4313
E-mail: sales@mooresemiparts.com